MIT researchers have demonstrated a shrinking technique called implosion carving that allows nanopatterning features throughout a material and shrinking them to nanoscale resolution (<100 nm).
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Powerful shrinking technique could enable devices that compute with light

< 100 nanometers Resolution
1/2,000 Shrink factor
< 100 nanometers Nanoscale feature
380–750 nanometers Wavelength range
34% co2 reduced
2 Million trees planted